Advances and Challenges in Developable Bottom Anti-Reflective Coating (DBARC)

Humidity Induced Defect Generation and Its Control during Organic Bottom Anti-reflective Coating in the Photo Lithography Process of Semiconductors

Defect generation during organic bottom anti-reflective coating (BARC) in the photo lithography process is closely related to humidity control in the BARC coating unit. Defects are related to the water component due to the humidity and act as a blocking material for the etching process, resulting in an extreme pattern bridging in the subsequent BARC etching process of the poly etch step. In thi...

Broadband Anti-Reflective Coating Based on Plasmonic Nanocomposite

We report on the fabrication, the characterization, and the optical simulation of a gold-silica nanocomposite and present its integration into a broadband anti-reflective coating (ARC) for a silicon substrate. The two-layer ARC consists of a nanocomposite (randomly distributed gold cluster in a silica matrix) and a pure silica film. We capitalize on the large refractive index of the composite t...

Bottom Anti-Reflective Coatings (BARCs) for 157-nm!Lithography

Bottom anti-reflective coatings (BARCs) are essential for achieving the 65-nm node resolution target by minimizing the substrate reflectivity to less than 1% and by planarizing substrates. We believe that the developments in 157-nm BARC products are on track to make them available for timely application in 157-nm lithography. We have made some significant improvements in resist compatibility an...

Advances and challenges in recombinant protein expression in Escherichia coli

Experimental Study of Coating in a Bottom Sprayed Fluidized Bed

Several investigations have been devoted towards understanding the coating process in fluidized beds. Most of these studies focused on spraying liquid droplets over the bed. However, due to the complexity of these systems, more investigations are still required to quantify the effect of operating conditions on the coating criteria. The present work aims at fundamentally understanding and pr...